METHOD AND DEVICE FOR OPERATING A LIQUID METAL-ION SOURCE OR LIQUID METAL ELECTRON SOURCE AS WELL AS A LIQUID METAL-ION SOURCE OR LIQUID METAL ELECTRON SOURCE

摘要

The invention relates to a liquid metal-ion beam system (1) or liquid metal electron beam system, comprising:a conductive emitter electrode (2),a conductive extractor electrode (3) opposite to the emitter electrode (2),a liquid metal reservoir (4) which is fluidically connected to the emitter electrode (2) for transporting liquid metal to the emitter electrode (2),a control unit (5) which is configured to apply a periodically varying operating voltage between emitter electrode (2) and extractor electrode (3).