Method and device for operating a liquid metal ion source or liquid metal electron source and liquid metal ion source or liquid metal electron source

摘要

The invention relates to a liquid metal ion beam system (1) or liquid metal electron beam system, comprising: - a conductive emitter electrode (2), - a conductive extractor electrode (3) opposite the emitter electrode (2), - a liquid metal reservoir (4), which is fluidly connected to the emitter electrode (2) in order to transport liquid metal to the emitter electrode (2), - a control unit (5) which is designed to switch between the emitter electrode (2) and the extractor -Electrode (3) to apply a periodically varying operating voltage.