Internal stress formation formation monocrystal component and monocrystal substrate production manner

摘要

Being large relatively, it designates the monocrystal substrate production manner which can produce the thin monocrystal substrate easily and that the internal stress formation formation monocrystal component is offered as topic. Inside the monocrystal component, the surface of irradiation side of the monocrystal component (10t) from laser light is done by the fact that it condenses, the surface (10t) with only alienation the surface (10t) with parallel extending stress formation of the two-dimensional condition which is present (13u) inside it possesses the reforming formation formation monocrystal component (11) with.