In the thin film formation supervisory mannered null thin film supervisory

摘要

PROBLEM TO BE SOLVED: To provide a method of monitoring thin-film formation using a dynamic interferometer.;SOLUTION: A method of realtime monitoring of thin-film growth that uses a dynamic interferometer is disclosed. A temporal phase change of a reflection coefficient of a growth thin-film stack is extracted through optical monitoring. The dynamic interferometer eliminates effects of vibration and air turbulence, and is used with a method for directly detecting a variable phase of the growth thin-film stack. The realtime reflection coefficient under vertical incidence of monitoring light can be obtained in the same manner as optical admittance, in conjunction with measurement of reflectance or transmittance, so that the coefficient is applicable to enhancement of error compensation on thin-film growth.;COPYRIGHT: (C)2012,JPO&INPIT