The component for the semiconductor production device which consists of the cordierite quality sintering body and this cordierite quality sintering body

摘要

Topic Coefficient of thermal expansion is small, at the same time ratio rigidity (= Young's modulus/specific gravity) and offers the component for the semiconductor production device which consists of the cordierite quality sintering body and this cordierite quality sintering body whose mechanical strength is high. Solutions Main crystal phase is the cordierite, it includes alumina, mullite and sahuirin as a subgrain phase, the amorphous phase which includes Ca in the grain boundary existing, it becomes, crystal phase ratio of aforementioned main crystal phase 95 mass % or more 97.5 mass % is below, the cordierite quality sintering body where crystal phase ratio of aforementioned subgrain phase 2.5 mass % or more 5 mass % is below, the content of Ca for in the entire quantity with CaO conversion 0.4 mass % or more 0.6 mass % is below. Choice figure It is not