The alumina quality sintering body and its manufacturing method and the component for the semiconductor production device, the component for the liquid crystal panel production device and component null for the dielectric

摘要

PPROBLEM TO BE SOLVED: To provide an alumina sintered compact lowering dielectric dissipation factor in the megahertz to gigahertz bands, and to provide a method for producing the same, a member for a semiconductor production apparatus, a member for a liquid-crystal panel production apparatus and a member for a dielectric resonator. PSOLUTION: The alumina sintered compact comprises at least ≥99.3 mass% aluminum in terms of AlSB2/SBOSB3/SBand other elements including silicon and strontium as elements, is constituted of alumina crystal grains 1 as main crystal grains, and has a crystal phase containing the elements Si, Al, Sr, and O at triple points 2 constituted of alumina crystal grains 1. The alumina sintered compact can retain the excellent corrosion resistance, mechanical properties, and electrical properties of alumina since the sintered compact contains ≥99.3 mass% aluminum in terms of AlSB2/SBOSB3/SB. In addition, since the crystal phase, comprising a compound containing the elements Si, Al, Sr, and O and having a low loss, is present at the triple points 2 constituted of alumina crystal grains 1, the alumina sintered compact can have a lower loss than conventional ones in the megahertz to gigahertz bands. PCOPYRIGHT: (C)2009,JPO&INPIT