The alumina quality sintered body, the component and the processor which for the processor use this, production methodological null alumina purity of sample processing method, and

摘要

PROBLEM TO BE SOLVED: To provide an alumina-based sintered compact in which the difference between the values of tanδ at a surface layer part and an inner part is small.;SOLUTION: The alumina-based sintered compact is characterized in that the alumina purity is ≥99-99.7 mass% and the maximum peak intensity of α-alumina crystal phase, measured by X-ray diffraction method, is assigned to (104) plane in a surface layer part and to (113) plane in an inner part at a depth of ≥10 mm from the surface layer part.;COPYRIGHT: (C)2007,JPO&INPIT