An illumination optical system for illuminating an imaging optical system and the object field for imaging the object field into an image field

摘要

The imaging optical system has a plurality of mirrors in the imaging (13) the image field of the image plane (14) object field in an object plane (11) and (9). One reflecting surface is constructed as a free-form surface can not be described by a rotationally symmetrical function of at least one of the mirrors. The object field, and a (x / y) aspect ratio of greater than 1, the ratio of the maximum transverse dimension and minimum transverse dimension of the object field is less than 0.9. In another embodiment, the image field (13) deviates from the mirror-symmetrical forms and field (9) and / or further object field. An illumination optical system for illuminating the (9) the object field (10) has a component that induces illumination light is designed to illuminate (9) object field, which is formed corresponding to (3). The result is a projection exposure system the imaging optical system most demanding imaging error correction over the field of view imaged by the imaging optical system is considered, the illumination optical system, and they have been fitted. [Selection] Figure Figure 1