Dissolved microfabrication process and related microelectromechanical device having support substrate having spacer mesas

摘要

PROBLEM TO BE SOLVED: To provide a process for manufacturing an MEMS device having a mechanical member and/or an electromechanical member which are more accurately defined.;SOLUTION: A method begins by providing a partially sacrificial substrate and a support substrate. A mesa is formed on the support substrate for disposing the mechanical member and/or the electromechanical member in an MEMS device to be finally manufactured while providing a space therebetween above the support substrate. The formation of the mesa on the support substrate rather than the partially sacrificial substrate allows the internal surface of the partially sacrificial substrate to remain flat without being etched, and, thus, the mechanical member and/or the electromechanical member can be accurately formed from the partially sacrificial substrate. Therefore, the mechanical member and/or the electrochemical member in the MEMS device can be defined by accurately etching a groove through the internal surface of the plane of the partially sacrificial substrate.;COPYRIGHT: (C)2011,JPO&INPIT