Airtight neutron leakage survey instrument of wafer and airtight neutron leakage inspection manner of wafer

摘要

P To provide a means that makes it possible to confirm a state of airtightness before an electronic component is completed to improve productivity of the electronic component. PSOLUTION: The airtightness leak inspection device for wafer that inspects an airtightness leak in the wafer having a tapered through hole wherein a metal material is buried includes a pressure operating-side adapter 110 coming into contact with an outer peripheral edge of one principal surface of the wafer to form a pressure operating space and a pressure measuring means 120 of measuring the pressure in the pressure operating space of the pressure operating-side adapter 110, a flow rate measuring-side adapter 130 coming into contact with an outer peripheral edge of the other principal surface of the wafer to form a flow rate measuring space and a flow rate measuring means 140 of measuring the flow rate of a fluid flowing in the flow rate measuring-side adapter 130. PCOPYRIGHT: (C)2010 and JPO& INPIT