Valve body sheet method of vacuum valve and vacuum valve of vacuum degassing equipment

摘要

PROBLEM TO BE SOLVED: To obtain a vacuum valve in a vacuum degassing equipment which surely and stably opens or shuts down an interval between a hopper and a vacuum degassing vessel, without damaging a valve element and a valve seat caused by addition material from the hopper.;SOLUTION: A hole opening 11b opened to a valve chest side of a second communicating hole 11 communicated with a vacuum degassing vessel 4, is arranged vertically under a hole opening 10b opened to the valve chest side of a first communicating hole 10 communicated with the hopper, the valve seat 13 is formed into an annular shape surrounding the periphery of the hole opening 10b of the first communicating hole 10 in the valve chest 12. Further, a valve opening/closing mechanism 16 is provided which switches a valve member 14 between a valve closing position allowing the valve seat 13 to be closed by bringing the valve element 15 into close contact with the valve seat 12 in the valve chest 12 against the vacuum pressure of the vacuum degassing vessel 4 from the valve chest 12 side and a valve opening position allowing the valve seat 13 to be opened by moving, in the valve chest 12, the valve element 15 to a position avoiding a position vertically under the hole opening 10b of the first communicating hole 10 and avoiding a position vertical over the hole opening 11b of the second communicating hole 11.;COPYRIGHT: (C)2011,JPO&INPIT