Auto focus control device and measurement processing apparatus using the control, as well as auto focus control method

摘要

PPROBLEM TO BE SOLVED: To shorten processing time for each object by making timing of processing by an optical system after finishing movement of a stage part early. PSOLUTION: When a camera 1 provided with an autofocus mechanism and a table part 2 supporting a workpiece W are each moved in X-axis and Y-axis directions by the stage part and consequently the camera 1 is successively aligned at a processing object portion of the workpiece W to perform imaging, processing by the autofocus mechanism for the camera 1 is stopped while the stage part is at least in an accelerated state after it starts movement. Furthermore, the stop state of the autofocus mechanism is maintained until the moving speed of the stage part reaches such speed that it can follow focus adjustment processing by the autofocus mechanism after the stage part gets in a decelerated state. Thereafter, the autofocus mechanism is actuated. PCOPYRIGHT: (C)2011,JPO&INPIT