When interference microscope measures the surface rough of the micromechanical device, as soon as the work distance of interference microscope and the depth of field is shortened, the interference images become slur for the measured object if there has small interference after clear focus. The auto-focusing system is introduced into the interference microscope, the system can obtain high definition interference image rapidly,and can improve the measuring velocity and measuring precision. The system is characterized by auto-focusing range of ±150 μm, auto-focusing precision of ±0.3 μm, auto-focusing time of 4～8 s.
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