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VTH CONTROL METHOD OF MULTIPLE ACTIVE LAYER METAL OXIDE SEMICONDUCTOR TFT
VTH CONTROL METHOD OF MULTIPLE ACTIVE LAYER METAL OXIDE SEMICONDUCTOR TFT
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机译:多个有源层金属氧化物半导体TFT的VTH控制方法
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摘要
The present invention generally relates to TFTs and methods for fabricating TFTs. When multiple layers are used for the semiconductor material in a TFT, a negative Vth shift may result. By exposing the semiconductor layer to an oxygen containing plasma and/or forming an etch stop layer thereover, the negative Vth shift may be negated.
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