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ON-CHIP THIN FILM ZERNIKE PHASE PLATE AND APPLICATIONS THEREOF
ON-CHIP THIN FILM ZERNIKE PHASE PLATE AND APPLICATIONS THEREOF
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机译:片上薄膜泽尔尼克相板及其应用
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摘要
The present invention provides an on-chip thin film phase plate for a releasing charging, comprising a chip substrate having one or more apertures; and a thin film layer attached to the top surface of the chip substrate. The present invention also provides a method for observing organic material by TEM, which uses the above-mentioned on-chip thin film phase plate in a TEM system.
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