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CLOUD-BASED ARCHITECTURE FOR ANALYSIS AND PREDICTION OF INTEGRATED TOOL-RELATED AND MATERIAL-RELATED DATA AND METHODS THEREFOR
CLOUD-BASED ARCHITECTURE FOR ANALYSIS AND PREDICTION OF INTEGRATED TOOL-RELATED AND MATERIAL-RELATED DATA AND METHODS THEREFOR
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机译:基于云的架构,用于分析和预测与工具相关和与材料相关的集成数据及其方法
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摘要
Cloud-based integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data (cause data) and material-related data (effect data) pertaining to at least one material processing tool and at least one material is disclosed. In an embodiment, the tool-related data is correlated with the material-related data and the correlated tool-related data and material-related data is employed by logic to perform, using a cloud computing approach, at least one of root-cause analysis, prediction model building and tool control/optimization.
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