Techniques for “wrapping” functional geometric elements with fill geometric elements are provided. With some implementations, functional geometric elements, such as geometric elements representing metal contact and interconnect structures, are identified in layout design data. Next, fill regions requiring fill geometric elements are identified. If a portion of a functional geometric element faces a fill region, then that portion of the functional geometric element is “wrapped” with fill structures. Typically, the exposed portions of the functional geometric elements are wrapped before the remaining fill region is populated with fill geometric elements. By wrapping the exposed portions of the functional geometric elements, a designer can surround the functional geometric elements with a predictable pattern of fill geometric elements that can serve to protect the functional geometric elements from, for example, the capacitive effect of other fill geometric elements in the fill region.
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