ROBUST MONOLITHIC MICROMECHANICAL VALVES FOR HIGH DENSITY MICROFLUIDIC VERY LARGE SCALE INTEGRATION

摘要

A fabrication method of a micromechanical valve includes: (1) forming a control layer according to a first weight ratio of cross linker: elastomer base; (2) forming a flow layer according to a second weight ratio of cross linker: elastomer base; (3) forming a membrane layer according to a third weight ratio of cross linker: elastomer base, where the third weight ratio is smaller than the first weight ratio, and is smaller than the second weight ratio; (4) bonding the membrane layer to the control layer to form a two-layer structure; and (5) bonding the two-layer structure to the flow layer to form the micromechanical valve.