METHOD OF FORMING REWORKABLE, THERMALLY CONDUCTIVE AND ELECTRICALLY RESISTIVE BONDING STRUCTURE IN SUPERCONDUCTOR MULTI-CHIP MODULE USING REWORKABLE EPOXY BONDING COMPOSITES AND APPLICATION OF THE SAME

摘要

In one aspect, the present invention relates to a method of forming a reworkable, thermally conductive and electrically resistive material as a bonding structure in a module and application of the same. In certain embodiments, a homogeneous solution is prepared with an anisotropic structure, such as single-wall carbon nanotubes (SWCNTs), and an epoxy resin. The homogeneous solution is applied between a carrier and a chip of the module, and cured at a curing temperature for a curing time period to form a reworkable epoxy bonding layer, which has an anisotropic structure loading factor of about 0.1%-1.0% such that the reworkable epoxy bonding layer is thermally conductive and electrically resistive. When the chip is identified as a faulty chip, the module may be heated at a debonding temperature for a debonding time period such that the reworkable epoxy bonding layer debonds, and the chip becomes detachable from the carrier.