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METHODS AND SYSTEMS FOR MEMS CMOS-BASED RADIO FREQUENCY FILTERS HAVING ARRAYS OF ELEMENTS
METHODS AND SYSTEMS FOR MEMS CMOS-BASED RADIO FREQUENCY FILTERS HAVING ARRAYS OF ELEMENTS
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机译:具有元素阵列的基于MEMS CMOS的射频滤波器的方法和系统
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摘要
Systems and methods for manufacturing a chip comprising a MEMS-based radio frequency filter arranged in an integrated circuit are provided. In one aspect, the systems and methods provide for a chip including electronic elements formed on a semiconductor material substrate. The chip further includes a stack of interconnection layers including layers of conductor material separated by layers of dielectric material. A radio frequency filter is formed within the stack of interconnection layers by applying gaseous HF to the interconnection layers. The radio frequency filter includes a plurality of mechanically decoupled resonator elements.
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