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METHODS AND SYSTEMS FOR CMOS-BASED RADIO-FREQUENCY FILTERS OF MEMS HAVING ORGANIZED SETS OF ELEMENTS
METHODS AND SYSTEMS FOR CMOS-BASED RADIO-FREQUENCY FILTERS OF MEMS HAVING ORGANIZED SETS OF ELEMENTS
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机译:具有元素的有机集合的MEMS的基于CMOS的射频滤波器的方法和系统
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摘要
The invention provides systems and methods for producing a chip comprising a radio-frequency filter which is based on MEMS and is arranged inside an integrated circuit. In one aspect, the systems and methods provide a chip which includes electronic elements formed on a substrate made of semiconductor material. The chip additionally includes an interconnection layer stack which includes layers of conductive material which are separated by layers of dielectric material. A radio-frequency filter is formed inside the interconnection layer stack by applying gaseous HF to the interconnection layers. The radio-frequency filter includes a plurality of resonator elements which are mechanically decoupled.
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