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Scribe line test modules for in-line monitoring of context dependent effects for ICs including MOS devices
Scribe line test modules for in-line monitoring of context dependent effects for ICs including MOS devices
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机译:抄写线测试模块,用于对包括MOS器件在内的IC的上下文相关效应进行在线监控
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摘要
An apparatus includes a plurality of die areas having integrated circuit (IC) die each having circuit elements for performing a circuit function, and scribe line areas between the die areas. At least one test module is formed in the scribe line areas. The test module includes a reference layout that includes at least one active reference MOS transistor that has a reference spacing value for each of a plurality of context dependent effect parameters, and a plurality of variant layouts. Each variant layout provides at least one active variant MOS transistor that provides a variation with respect to the reference spacing values for at least one of the plurality of context dependent effect parameters.
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