首页> 外国专利> Sintered silver joints via controlled topography of electronic packaging subcomponents

Sintered silver joints via controlled topography of electronic packaging subcomponents

机译:通过电子包装子组件的受控形貌烧结银接头

摘要

Disclosed are sintered silver bonded electronic package subcomponents and methods for making the same. Embodiments of the sintered silver bonded EPSs include topography modification of one or more metal surfaces of semiconductor devices bonded together by the sintered silver joint. The sintered silver bonded EPSs include a first semiconductor device having a first metal surface, the first metal surface having a modified topography that has been chemically etched, grit blasted, uniaxial ground and/or grid sliced connected to a second semiconductor device which may also include a first metal surface with a modified topography, a silver plating layer on the first metal surface of the first semiconductor device and a silver plating layer on the first metal surface of the second semiconductor device and a sintered silver joint between the silver plating layers of the first and second semiconductor devices which bonds the first semiconductor device to the second semiconductor device.
机译:公开了一种烧结的银结合的电子封装子部件及其制造方法。烧结的银键合EPS的实施例包括通过烧结的银接头键合在一起的半导体器件的一个或多个金属表面的形貌改变。烧结的银键合EPS包括具有第一金属表面的第一半导体器件,该第一金属表面具有已被化学蚀刻,喷砂处理,单轴接地和/或被切片连接至第二半导体器件的网格的改变的形貌,该第二半导体器件还可包括具有改变的形貌的第一金属表面,在第一半导体器件的第一金属表面上的银镀层和在第二半导体器件的第一金属表面上的银镀层以及在该半导体器件的银镀层之间的烧结银接头。将第一半导体器件结合到第二半导体器件的第一和第二半导体器件。

著录项

  • 公开/公告号US8822036B1

    专利类型

  • 公开/公告日2014-09-02

    原文格式PDF

  • 申请/专利权人 UT-BATTELLE LLC;

    申请/专利号US201313787366

  • 发明设计人 ANDREW A. WERESZCZAK;

    申请日2013-03-06

  • 分类号B23K1/06;H01L23/10;H01L23/00;

  • 国家 US

  • 入库时间 2022-08-21 16:03:12

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