Weighting surface fit points based on focus peak uncertainty

摘要

A machine vision inspection system acquires a plurality of images of a workpiece region of interest at various focus heights, and determines a Z-height (e.g., the best focus height) for the region of interest based on a focus peak determining data set for the region of interest. The focus peak determining data set is derived from the plurality of images. The machine vision inspection system also determines Z-height quality meta-data based on data derived from the plurality of images (e.g., based on the focus peak determining data set), and associates the Z-height quality meta-data with the corresponding Z-heights. The Z-height quality meta-data are usable to establish weighting factors that are used in association with the corresponding best focus Z-heights in subsequent operations that fit a workpiece surface representation to a plurality of the best focus Z-heights.