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Apparatus and method for magnetic field assisted electrochemical discharge machining

机译:磁场辅助电化学放电加工的设备和方法

摘要

In an apparatus and method for magnetic field assisted electrochemical discharge machining (ECDM), the magneto hydrodynamic (MHD) effect is utilized to improve the thickness of bubble film and the electrolyte circulation so as to enhance the machining accuracy and efficiency. Since charged ions in a magnetic field are induced by Lorenz force to move, and the electrolysis bubbles generated in the ECDM process are suffused with electrification ions on their surfaces, the electrolysis bubbles can be forced to move in the direction of the magnetic field without the need of mechanical disturbance. The present invention can be widely applied in the micro-machining of non-conductive brittle materials of different dimensions and shapes, comprising the forming of microchannels and microholes on a biochip, and in the micro-opto-electro-mechanical system (MOEMS) and various kinds of micro-machining fields. The machined surface is smooth and does not require a second time machining.
机译:在用于磁场辅助电化学放电加工(ECDM)的设备和方法中,利用磁流体动力学(MHD)效应来改善气泡膜的厚度和电解质循环,从而提高加工精度和效率。由于磁场中的带电离子由洛伦兹力引起移动,并且在ECDM工艺中生成的电解气泡的表面上充满了电离离子,因此可以迫使电解气泡沿磁场方向移动,而不会需要机械干扰。本发明可广泛应用于不同尺寸和形状的非导电脆性材料的微加工,包括在生物芯片上形成微通道和微孔,以及微光机电系统(MOEMS)和各种微加工领域。加工的表面是光滑的,不需要第二次加工。

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