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An Investigation into Laser-Assisted Electrochemical Discharge Machining of Transparent Insulating Hard-Brittle Material

机译:透明绝缘硬脆材料激光辅助电化学放电加工研究

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摘要

Electrochemical discharge machining (ECDM) and laser machining are emerging nontraditional machining technologies suitable for micro-processing of insulating and hard-brittle materials typified by glass. However, poor machinability of glass is a major constraint, which remains to be solved. For the micro-grooves processed by ECDM, the bottom surface is usually uneven and associated with protrusion structures, while the edges are not straight with obvious wave-shaped heat-affected zones (HAZs) and over-cutting. Besides, the cross section of the micro-grooves processed by the laser is V-shape with a large taper. To solve these problems, this study proposed the laser-assisted ECDM for glass micro-grooving, which combines ECDM and laser machining. This study compared morphological features of the single processing method and the hybrid processing method. The results show that ECDM caused cylindrical protrusions at the bottom of the microgrooves. After processing these micro-grooves by laser, the cylindrical protrusions were removed. However, the edge quality of the microgrooves was still poor. Therefore, we used the laser to get microgrooves first, so we got micro-grooves with better edge quality. Then we use ECDM to improve the taper of microgrooves and the cross-sectional shape of the microgrooves transformed from a V-shape to a U-shape.
机译:电化学放电加工(ECDM)和激光加工是新兴的非传统加工技术,适用于玻璃的绝缘和硬质材料微处理。然而,玻璃的可加工性差是一个主要的约束,其仍有待解决。对于由ECDM处理的微槽,底表面通常不均匀并且与突起结构相关联,而边缘则不直接具有明显的波形热影响区域(HAZS)和过切割。此外,由激光处理的微槽的横截面是具有大锥形的V形。为了解决这些问题,本研究提出了用于玻璃微槽的激光辅助ECDM,其结合了ECDM和激光加工。该研究比较了单加工方法的形态特征及其混合处理方法。结果表明,ECDM引起了微液流底部的圆柱突起。通过激光加工这些微槽后,去除圆柱形突起。然而,微型侵略者的边缘质量仍然差。因此,我们首先使用激光器获得微砾岩,因此我们得到了更好的边缘质量的微槽。然后,我们使用ECDM改善微液流的锥度和从V形转化为U形的微型侵蚀的微型腔的横截面形状。

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