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Micro positioning test socket and methods for active precision alignment and co-planarity feedback

机译:微型定位测试插座以及用于主动精确对准和共面反馈的方法

摘要

Methods and structures for testing a microelectronic packaging structure/device are described. Those methods may include placing a device in a floating carrier, wherein the floating carrier is coupled to a socket housing by pin dowels disposed in four corners of the socket housing, and wherein at least two actuating motors are disposed within the socket housing, and micro adjusting the device by utilizing a capacitive coupled or a fiber optic alignment system wherein a maximum measured capacitance or maximum measured intensity between alignment structures disposed in the socket housing and alignment package balls disposed within the device indicate optimal alignment of the device. Methods further include methods for active co-planarity detection through the use of a capacitive-coupled techniques.
机译:描述了用于测试微电子封装结构/装置的方法和结构。这些方法可以包括将设备放置在浮动托架中,其中,浮动托架通过设置在插座壳体的四个角中的销钉与插座壳体耦接,并且其中至少两个致动马达设置在插座壳体中,并且微型通过使用电容性耦合或光纤对准系统来调节设备,其中在插座壳体中布置的对准结构与设备中布置的对准封装球之间的最大测量电容或最大测量强度指示了设备的最佳对准。方法还包括用于通过使用电容耦合技术进行主动共面检测的方法。

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