首页>
外国专利>
Integrated heater on MEMS cap for wafer scale packaged MEMS sensors
Integrated heater on MEMS cap for wafer scale packaged MEMS sensors
展开▼
机译:MEMS帽上的集成加热器,用于晶圆级封装的MEMS传感器
展开▼
页面导航
摘要
著录项
相似文献
摘要
A system and method for controlling temperature of a MEMS sensor are disclosed. In a first aspect, the system comprises a MEMS cap encapsulating the MEMS sensor and a CMOS die vertically arranged to the MEMS cap. The system includes a heater integrated into the MEMS cap. The integrated heater is activated to control the temperature of the MEMS sensor. In a second aspect, the method comprises encapsulating the MEMS sensor with a MEMS cap and coupling a CMOS die to the MEMS cap. The method includes integrating a heater into the MEMS cap. The integrated heater is activated to control the temperature of the MEMS sensor.
展开▼