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Electrostatic discharge (ESD) protection device, method of fabricating the device, and electronic apparatus including the device
Electrostatic discharge (ESD) protection device, method of fabricating the device, and electronic apparatus including the device
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机译:静电放电(ESD)保护装置,该装置的制造方法以及包括该装置的电子设备
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摘要
An electrostatic discharge (ESD) device includes a substrate, an external well of a first conductivity type in the substrate, and an internal well of a second conductivity type in the external well, the first conductivity type opposite the second conductivity type. The ESD device further includes a first heavily doped region of the first conductivity type located at a surface of the internal well, a second heavily doped region of the second conductivity type located at a surface of the internal well, and a third heavily doped region of the first conductivity type located at a surface of the external well. The second heavily doped region is interposed between and spaced from each of the first and third heavily doped regions, and at least one of a space between the first and second heavily doped regions and a space between the second and third heavily doped regions is devoid of a device isolation structure of electrical isolation material.
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