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Method of fabricating a thin film transistor from amorphous silicon and organic light emitting diode display device having the thin film transistor

机译:由非晶硅制造薄膜晶体管的方法以及具有该薄膜晶体管的有机发光二极管显示装置

摘要

A thin film transistor (TFT), a method of fabricating the same, and an organic light emitting diode (OLED) display device including the TFT. The TFT includes a substrate having a pixel region and a non-pixel region, a semiconductor layer, a gate insulating layer, a gate electrode, and source and drain electrodes disposed on the pixel region, at least one gettering site disposed on the non-pixel region, and at least one connection portion to connect the at least one gettering site and the semiconductor layer. The method of fabricating the TFT includes patterning a polycrystalline silicon (poly-Si) layer to form a plurality of semiconductor layers, connection portions, and at least one gettering site, the semiconductor layers being connected to the at least one gettering site via the connection portions, and annealing the substrate to getter the plurality of semiconductor layers.
机译:薄膜晶体管(TFT),其制造方法以及包括该TFT的有机发光二极管(OLED)显示装置。 TFT包括具有像素区域和非像素区域的基板,半导体层,栅极绝缘层,栅电极以及设置在像素区域上的源极和漏极,至少一个吸气部位设置在非像素区域上。像素区,以及至少一连接部,用以连接至少一吸气部位与半导体层。制造TFT的方法包括对多晶硅(poly-Si)层进行构图以形成多个半导体层,连接部分和至少一个吸气位置,半导体层通过连接与至少一个吸气位置连接。部分,并退火衬底以吸除多个半导体层。

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