首页> 外国专利> POLYCRYSTALLINE SILICON CRYSTAL ORIENTATION DEGREE EVALUATION METHOD, POLYCRYSTALLINE SILICON ROD SELECTION METHOD, POLYCRYSTALLINE SILICON ROD, POLYCRYSTALLINE SILICON INGOT, AND POLYCRYSTALLINE SILICON FABRICATION METHOD

POLYCRYSTALLINE SILICON CRYSTAL ORIENTATION DEGREE EVALUATION METHOD, POLYCRYSTALLINE SILICON ROD SELECTION METHOD, POLYCRYSTALLINE SILICON ROD, POLYCRYSTALLINE SILICON INGOT, AND POLYCRYSTALLINE SILICON FABRICATION METHOD

机译:多晶硅晶体取向度评估方法,多晶硅棒选择方法,多晶硅棒,多晶硅锭和多晶硅制造方法

摘要

The present invention provides a technology which selects, with high levels of quantitativity and reproducibility, a desirable polycrystalline silicon as a raw material for single crystal silicon fabrication, and contributes to stable fabrication of the single crystal silicon. When evaluating a degree of orientation of a crystal of a polycrystalline silicon by x-ray diffraction: an adopted disc-shaped sample (20) is positioned in a location in which Bragg reflection from a mirror index face hkl is detected; an in-plane rotation is carried out at a rotation angle (Φ) with the center of the disc-shaped sample (20) as the center of rotation thereof, such that an x-ray projection region which is defined by a slit Φ scans a primary surface of the disc-shaped sample (20); a chart is derived which denotes a rotation angle (Φ) dependency of the disc-shaped sample (20) of the Bragg reflection intensity from the Miller index face hkl; a baseline is derived from the chart; and a value of an intensity of diffraction of the baseline is employed as an evaluation index of the degree of orientation of the crystal.
机译:本发明提供了一种技术,该技术以高水平的定量性和再现性选择期望的多晶硅作为用于单晶硅制造的原料,并且有助于稳定地制造单晶硅。当通过X射线衍射评价多晶硅的晶体的取向度时,将采用的盘状样品(20)放置在检测到来自镜折射率面的布拉格反射的位置。以圆盘状样品(20)的中心为旋转中心,以旋转角度(Φ)进行面内旋转,从而扫描由狭缝Φ限定的X射线投影区域盘状样品(20)的主表面;从米勒折射率面导出表示布拉格反射强度的盘状样本(20)的旋转角(Φ)依赖性的图表。从图表得出基线;基线的衍射强度的值被用作晶体的取向度的评价指标。

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