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METHOD FOR TRANSFERRING GRAPHENE FILM USING ELECTROSTATIC PROTECTION FILM AS MEDIUM

机译:以静电保护膜为介质转移石墨烯膜的方法

摘要

The present invention relates to a method for transferring a graphene film using an electrostatic protection film as a medium. The method comprises: using the electrostatic adsorption of an electrostatic protection film to adhere a graphene comprising a growth substrate, then removing the growth substrate to obtain a graphene/electrostatic protection film combination, and finally, adhering the single-layer graphene/electrostatic protection film combination to a target substrate and releasing static electricity to remove the electrostatic protection film to obtain a single-layer graphene film; alternatively, after the single-layer graphene/electrostatic protection film combination is obtained, replacing the electrostatic protection film with the single-layer graphene/electrostatic protection film combination, and on a new graphene comprising a growth substrate, repeatedly adhering the graphene/electrostatic protection film and removing the growth substrate in sequence, so as finally to obtain a multilayer graphene film. The method has a simple and convenient operation, has no residue of glue and does not need an organic solvent to conduct subsequent cleaning, thereby reducing the process costs for transferring a graphene film.
机译:本发明涉及一种使用静电保护膜作为介质转移石墨烯膜的方法。该方法包括:利用静电保护膜的静电吸附来粘附包括生长衬底的石墨烯,然后去除生长衬底以获得石墨烯/静电保护膜的组合,最后,粘附单层石墨烯/静电保护膜。结合至目标基板并释放静电以去除静电保护膜以获得单层石墨烯膜。或者,在获得单层石墨烯/静电保护膜组合后,用单层石墨烯/静电保护膜组合代替静电保护膜,并在包括生长衬底的新石墨烯上,重复粘附石墨烯/静电保护膜,依次去除生长衬底,最终得到多层石墨烯膜。该方法操作简单方便,不残留胶水,不需要有机溶剂进行后续清洗,从而降低了转移石墨烯膜的工艺成本。

著录项

  • 公开/公告号WO2014019387A1

    专利类型

  • 公开/公告日2014-02-06

    原文格式PDF

  • 申请/专利权人 WUXI GRAPHEN FILM CO. LTD;

    申请/专利号WO2013CN74835

  • 发明设计人 QIU YURUI;TAN HUABING;WANG ZHENZHONG;

    申请日2013-04-26

  • 分类号B32B37;B32B38/10;C01B31/04;

  • 国家 WO

  • 入库时间 2022-08-21 15:51:58

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