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MEANDERING OSCILLATOR, OPTICAL REFLECTING ELEMENT USING MEANDERING OSCILLATOR AND IMAGE PROJECTION DEVICE USING MEANDERING OSCILLATOR
MEANDERING OSCILLATOR, OPTICAL REFLECTING ELEMENT USING MEANDERING OSCILLATOR AND IMAGE PROJECTION DEVICE USING MEANDERING OSCILLATOR
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机译:入射振荡器,使用入射振荡器的光学反射元件以及使用入射振荡器的图像投影装置
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摘要
A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, according to the invention, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
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