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COMA ABERRATION CORRECTION DEVICE, COMA ABERRATION PROFILE CALCULATION METHOD, AND COMA ABERRATION CORRECTION METHOD

机译:彗形像差校正装置,彗形像差轮廓计算方法和彗形像差校正方法

摘要

This coma aberration correction device is equipped with: a first coma aberration profile calculation means that emits a second light beam (L1) to a guide layer (51) at multiple positions in order to calculate a coma aberration profile of the guide layer; a coma aberration calculation means that emits the second light beam to one recording layer (L0) at a predetermined radial position (R1) in order to calculate a coma aberration at the predetermined radial position; a second coma aberration profile calculation means that calculates a coma aberration profile at the predetermined radial position by using the coma aberration at the predetermined radius value position of the one recording layer, the coma aberration profile of the guide layer, and positional information on the respective layers in the thickness direction; a third coma aberration profile calculation means that calculates coma aberration profiles of multiple recording layers by using the coma aberration profile of the guide layer and the coma aberration profile at the predetermined radius position; and a correction means that applies a control voltage, which is based on the coma aberration profiles of the multiple recording layers, to a correction component (LC1) in order to correct the coma aberration of the second light beam.
机译:该彗形像差校正装置包括:第一彗形像差分布计算装置,其在多个位置向引导层(51)发射第二光束(L1),以便计算引导层的彗形像差分布。彗形像差计算装置,其在预定的径向位置(R1)处将第二光束发射到一个记录层(L0),以便计算在预定的径向位置处的彗形像差;第二彗形像差分布图计算装置通过使用一个记录层的预定半径值位置处的彗形像差,引导层的彗形像差分布图以及各自的位置信息来计算预定径向位置处的彗形像差分布图。在厚度方向上的层;第三彗形像差轮廓计算装置,其通过使用引导层的彗形像差轮廓和预定半径位置处的彗形像差轮廓来计算多个记录层的彗形像差轮廓。校正装置,其将基于多个记录层的彗形像差分布的控制电压施加到校正分量(LC1),以校正第二光束的彗形像差。

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