Waveguide-integrated plasmonic resonator for integrated SERS measurements

摘要

A resonator structure (100) for supporting radiation in a resonating cavity (170) is described. The resonator structure (100) comprises a metal ― insulator - metal waveguide, the metal ― insulator - metal waveguide comprising two metal layers (110, 130) and an insulating layer (120) sandwiched between the two metal layers (110, 130). The resonator structure (100) also comprises at least one nano-scale metallic reflector (160a, 160b), the at least one nano-scale metallic reflector (160a, 160b) being positioned at least partly in the insulating layer (120) and forming at least one mirror of the resonating cavity in the insulating layer (120).