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PRODUCTION METHOD OF A SENSOR CHIP AND COMPUTERIZED TOMOGRAPHY DETECTOR
PRODUCTION METHOD OF A SENSOR CHIP AND COMPUTERIZED TOMOGRAPHY DETECTOR
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机译:传感器芯片和计算机断层摄影仪的生产方法
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摘要
The invention relates to a sensor chip, in particular for computerized tomography detectors, having an analog-digital converter (10) electrically connected to an element (9) detecting radiation. The problem addressed by the invention is that of defining a sensor chip which is as cost-efficient and reliable as possible. According to the invention this problem is solved by only using one single crystalline base plate (1), on which all required components (7, 9, 10) of the sensor chip are applied, wherein a through-contact (6) between the conductor paths (14, 15) or the contacts of both sides (12, 13) of the base plate is used as applicable in order to connect the components (7, 9, 10) of both sides (12, 13) to each other.
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