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PRODUCTION METHOD OF A SENSOR CHIP AND COMPUTERIZED TOMOGRAPHY DETECTOR

机译:传感器芯片和计算机断层摄影仪的生产方法

摘要

The invention relates to a sensor chip, in particular for computerized tomography detectors, having an analog-digital converter (10) electrically connected to an element (9) detecting radiation. The problem addressed by the invention is that of defining a sensor chip which is as cost-efficient and reliable as possible. According to the invention this problem is solved by only using one single crystalline base plate (1), on which all required components (7, 9, 10) of the sensor chip are applied, wherein a through-contact (6) between the conductor paths (14, 15) or the contacts of both sides (12, 13) of the base plate is used as applicable in order to connect the components (7, 9, 10) of both sides (12, 13) to each other.
机译:传感器芯片技术领域本发明涉及一种传感器芯片,特别是用于计算机断层摄影检测器的传感器芯片,该传感器芯片具有电连接至检测辐射的元件(9)的模数转换器(10)。本发明解决的问题是限定一种传感器芯片,该传感器芯片尽可能地成本有效且可靠。根据本发明,该问题仅通过使用一个单晶基板(1)来解决,该单晶基板上应用了传感器芯片的所有必需组件(7、9、10),其中导体之间的贯通触点(6)为了将两侧(12、13)的部件(7、9、10)彼此连接,可适当地使用基板的两侧的路径(14、15)或触点(12、13)。

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