PRODUCTION METHOD OF A SENSOR CHIP AND COMPUTERIZED TOMOGRAPHY DETECTOR

摘要

The invention relates to a sensor chip, in particular for computerized tomography detectors, having an analog-digital converter (10) electrically connected to an element (2) detecting radiation, and a crystalline base plate (1). The invention addresses the problem In order to solve the problem of improving the robustness, service life and expense of such sensor chips, advantageous solutions are found according to the invention, wherein components of the radiation-detecting element (2) are lithographically integrated on a detector side (12) of the crystalline base plate (1) and components of the analog-digital converter (10) are lithographically integrated on a second side (13) of the crystalline base plate (1). It is advantageous that an expensive wafer-bonding process can be avoided and cumbersome contacting assignments between the radiation-detecting element (2) and the analog-digital converter (10) can be significantly simplified by means of semiconductor technology.