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FABRICATION METHOD OF CIS THIN FILMS AND ITS APPLICATION TO CIS THIN FILM SOLAR CELLS

机译:CIS薄膜的制备方法及其在CIS薄膜太阳能电池中的应用

摘要

The present invention relates to a method for manufacturing a CIS thin film and a CIS thin film solar cell manufactured using the same. The method for manufacturing a CIS thin film according to the present invention comprises the following steps: depositing an electrode layer in the upper part of a substrate, sputtering a single target containing copper (Cu), indium (In), and selenium (Se) in the upper part of the electrode layer and depositing a light absorption layer, wherein the thickness of the CIS thin film is adjusted to manufacture the CIS thin film solar cell having structurally and optically excellent properties. Therefore, the CIS thin film can be manufactured by a single deposition process using a CIS (CuInSe2) single sputtering target, thereby simplifying processes and expecting advantageous effects in finance and efficiency.
机译:CIS薄膜的制造方法以及使用该薄膜的CIS薄膜太阳能电池技术领域本发明涉及一种CIS薄膜的制造方法以及使用该薄膜的CIS薄膜太阳能电池。根据本发明的用于制造CIS薄膜的方法包括以下步骤:在基板的上部中沉积电极层;溅射包含铜(Cu),铟(In)和硒(Se)的单个靶材。在电极层的上部并沉积光吸收层,其中调节CIS薄膜的厚度以制造具有结构和光学上优异性能的CIS薄膜太阳能电池。因此,可以通过使用CIS(CuInSe 2)单溅射靶的单沉积工艺来制造CIS薄膜,从而简化了工艺并且期望在财务和效率上具有有利的效果。

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