PROBE CARD-SECURING DEVICE, PROBE INSPECTION DEVICE, PROBE INSPECTION METHOD, AND PROBE CARD

摘要

due to the thermal expansion of the probe card and the card holder to suppress the variation of the position of the probe tip caused a probe card fixture , probe inspection apparatus , inspection method provides a probe and a probe card to be . The probe card probe card retainer for securing (10 ) to the prober , the connection ring for fixing to the housing of the prober 30 and , fitting the outer peripheral portion of the connection ring 30 and between the probe card 10 and a card holder 20 for holding , and a PCLS (50) for fixing the central portion and the connection ring 30 of the probe card (10). ;