SEALING DEVICE AND METHOD BETWEEN CHAMBER HOUSING AND PLATE HOUSING, AND HEAT TREATMENT CHAMBER AND HEAT TREATMENT APPARATUS OF SUBSTRATE HAVING THE SAME

摘要

The present invention provides a device and a method for sealing a gap between a chamber housing and a plate housing, and a heat treatment chamber and a heat treatment apparatus for a substrate having a sealing device. The device for sealing a gap between a chamber housing and a plate housing according to the present invention includes: a first seal member provided on the rear surface of the plate housing and formed of a flexible material to seal an upper gap between the plate housing and the chamber housing; and a second seal member provided on the rear surface of the plate housing and formed of a flexible material to seal a lower gap between the plate housing and the chamber housing. The first seal member includes a first fixing part to detachably fix the first seal member to the top surface of the plate housing and a second fixing part to fix the first seal member to the chamber housing. The second seal member includes a third fixing part to detachably fix the second seal member to the bottom surface of the plate housing and a fourth fixing part to fix the second seal member to the chamber housing. The first and second fixing parts are detachably fixed on the top surface and the bottom surface of the plate housing, respectively, by the first and third fixing members. The second and fourth fixing parts are fixed to the chamber housing by the second and fourth fixing members, respectively.