METHOD FOR FORMING OBLIQUE DEPOSITION AND APPARATUS FOR FORMING OBLIQUE ANGLE DEPOSITION

摘要

The present invention relates to a kind of inclined coating of formation and an oblique deposition devices. The invention discloses a kind of oblique deposition devices, including a vacuum tank; Substrate support is mounted on vacuum tank; Vacuum tank is mounted on vacuum deposition source to carry out vacuum deposition; One first rotating mechanism, wherein clamper and a first rotating shaft; One second rotating mechanism is connected to the first rotating mechanism and passes through a gear; Make to be used to form inclination coating by oblique deposition device by the first rotating mechanism and the second rotating mechanism and one kind on substrate holder rotation vertical plane with substrate rotating device. ;The 2014 of copyright KIPO submissions