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UNIT FOR MEASURING THICKNESS OF ORGANIC THIN FILM AND ORGANIC THIN FILM DEPOSITING APPARATUS HAVING SAME
UNIT FOR MEASURING THICKNESS OF ORGANIC THIN FILM AND ORGANIC THIN FILM DEPOSITING APPARATUS HAVING SAME
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机译:测量有机薄膜厚度的装置和具有相同功能的有机薄膜沉积装置
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摘要
The present invention discloses a unit for measuring the thickness of an organic thin film and an organic thin film depositing apparatus having the same. The unit includes: a base; a first support joined with the base; a second support of which one end is joined with the first support; a measuring member which is joined with the other end of the second support and measures the thickness of the organic thin film deposited on an object for deposition; and a position adjusting member which adjusts the position of the measuring member.;COPYRIGHT KIPO 2014
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