首页> 外国专利> UNIT FOR MEASURING THICKNESS OF ORGANIC THIN FILM AND ORGANIC THIN FILM DEPOSITING APPARATUS HAVING SAME

UNIT FOR MEASURING THICKNESS OF ORGANIC THIN FILM AND ORGANIC THIN FILM DEPOSITING APPARATUS HAVING SAME

机译:测量有机薄膜厚度的装置和具有相同功能的有机薄膜沉积装置

摘要

The present invention discloses a unit for measuring the thickness of an organic thin film and an organic thin film depositing apparatus having the same. The unit includes: a base; a first support joined with the base; a second support of which one end is joined with the first support; a measuring member which is joined with the other end of the second support and measures the thickness of the organic thin film deposited on an object for deposition; and a position adjusting member which adjusts the position of the measuring member.;COPYRIGHT KIPO 2014
机译:本发明公开了一种用于测量有机薄膜的厚度的单元和具有该单元的有机薄膜沉积设备。该单元包括:底座;与基地一起的第一支支持;第二支撑件,其一端与第一支撑件连接;测量构件,其与第二支撑件的另一端接合,并测量沉积在待沉积物体上的有机薄膜的厚度; COPYRIGHT KIPO 2014;以及用于调节测量构件位置的位置调节构件。

著录项

  • 公开/公告号KR20140105670A

    专利类型

  • 公开/公告日2014-09-02

    原文格式PDF

  • 申请/专利权人 SAMSUNG DISPLAY CO. LTD.;

    申请/专利号KR20130019389

  • 发明设计人 LEE YOON JAEKR;CHOI YOUNG MOOKKR;

    申请日2013-02-22

  • 分类号H01L51/56;G01B7/06;H05B33/10;

  • 国家 KR

  • 入库时间 2022-08-21 15:42:15

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