MICROTIP ARRAYS FOR NANO LITHOGRAPHY, MANUFACTURING METHOD OF THE SAME AND NANO LITHOGRAPHY METHOD USING THE SAME

摘要

The present invention relates to a nanoplasmonic microtip array for nanolithography, a method of manufacturing the same, and a nanolithography method using the same. More particularly, the present invention relates to a microtip array for nanolithography which can fabricate a nanostructure of diffraction limit or less by manufacturing an large-scaled elastomer or polymer microtip array and forming a metal nanostructure on the surface of the array, a method of manufacturing the same, and a nanolithography method using the same. In a microtip array for nanolithography, the micro tip array provides a micro tip array for nanolithography which has a surface where metal nanostructures are formed.