RESPONDING RESIDUAL PRODUCT PROCESSOR, METHOD FOR PROCESSING RESPONDING RESIDUAL PRODUCT, AND MANUFACTURE EQUIPMENT OF SEMICONDUCTOR DEVICE HAVING RESPONDING RESIDUAL PRODUCT PROCESSOR

摘要

In a responding residual product processor and manufacture equipment of a semiconductor device having the same, directly connected are a coercive delivery unit coercively delivering a responding residual product of an object to be purified and a residual product purifying unit purifying by drawing the responding residual product inside and separating the same into power and by-product gas. Accordingly, the responding residual product is supplied from the coercive delivery unit to the residual product purifying unit without flowing pipeline. The responding residual product processor selects a proper exhausting pipe according to the flowing amount of the purified by-product gas, and prevents the decline of the flowing velocity and the deposition of the power while the responding residual product moves along the flowing pipeline.;COPYRIGHT KIPO 2014