METHOD FOR HIGH-RESOLUTION AFM MEASUREMENT FOR THREE DIMENSIONAL STRUCTURE OF FREE-STANDING NANO STRUCTURE

摘要

An accurate AFM measurement for three dimensional structures for an independent nanostructure according to the present invention includes: a step of fixating an independent nanostructure after growing nano-molecules around the independent nanostructure; a step of planarizing the surface of the nano-molecules by heat-treating the nano-molecules; and a step of measuring the independent nanostructure by placing an AFP probe on the top of the indenpendent nanostructure.