CLEANING AGENT FOR SILICON WAFER, WATER-REPELLENT CLEANING LIQUID AND CLEANING METHOD FOR SURFACE OF SILICON WAFER

摘要

silicone cleaners and water-based cleaning solution , at least for the wafer , to hydrate at least recesses to the uneven pattern during the cleaning process comprises a cleaning liquid for water repellent and water-repellent- art cleaning liquid , water-repellent compound containing the Si element and chemically bonded with a hydrophobic group as reactive site of the silicon wafer and , to be that the organic solvent comprises a mixture containing at least an alcohol solvent . With this cleaner , it is possible to improve the easy cleaning process to cause the pattern collapse . ;