SAMPLE STAGE FOR SCANNING ELECTRON MICROSCOPE OF MOVABLE PROVE AND SCANNING ELECTRON MICROSCOPE OF THE SAME

摘要

The present invention relates to a sample stage of a scanning electron microscope, the sample stage of the scanning electron microscope of the present invention as being arranged in a scanning electron microscope to analyze the characteristics of the sample, the sample is a sample unit that is mounted ; A probe unit for contact with the sample to determine the properties of the sample mounted on the sample portion; And the one side is fixed to the treatment portion , and the other side is coupled to the probe unit , is characterized in that it comprises a position control portion for controlling the probe position on the sample unit . According to the present invention , it is possible to move the position of the probe in a scanning electron microscope locally there is an effect that it is possible to determine the mechanical or electrical properties at the same time . ;