CONTROLLER GAIN SCHEDULING FOR MASS FLOW CONTROLLERS

摘要

group feedback mass gain the mass flow controller having a sensor configured to sense the flow rate of fluid through the controller , ; The valve is arranged to control the flow of fluid through the controller; And a processor configured to control the valve according to the flow rate of the fluid is detected by the sensor . The sensor and the valve is disposed in the feedback system , the processors on the basis of the ratio of the at least one calibration gas parameter for at least one operating gas parameters in real-time updating the feedback controller gain , compensation conditions and in different operating conditions, regardless of the closed loop transfer function is the operating condition of the feedback control system to have a consistent performance substantially is maintained constant .