piezoelectric thin film specimen for measuring tensile strength and fatigue properties and manufacturing method thereof

摘要

This invention is in the SEM in order to measure in-situ method for the tensile strength and fatigue properties of the piezoelectric thin-film specimens relates to a specimen and a method of manufacturing the piezoelectric thin film having a structure so that it can be mounted securely without damaging the specimen. Piezoelectric thin-film specimen for measuring the tensile strength and fatigue properties according to the invention, a pair of island form of the pattern is etched by the lower mask having a substrate that is configured to have a center island in the center; PT lower layer formed on the substrate by the lower position is tugong PT mask corresponding to the island of the substrate; Wherein the position of the substrate corresponding to the island tugong the PZT and the top layer and the top PT PT PZT layer are sequentially formed on the mask layer by PT; And by the heat ray mask of the type corresponding to the island of the substrate characterized in that it comprises a heating wire constitutive consisting PT to the upper layer. ;