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PURIFICATION METHOD FOR OFF-GAS AND APPARATUS FOR PURIFICATION OF OFF-GAS
PURIFICATION METHOD FOR OFF-GAS AND APPARATUS FOR PURIFICATION OF OFF-GAS
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机译：尾气的净化方法及尾气的净化装置
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摘要
The present invention relates to a method and device for refining a waste gas. More specifically, the present invention relates to a method and device for refining a waste gas, wherein hydrogen chloride can be removed and high purity hydrogen can be separated from a waste gas that is discharged after a polysilicon deposition process is performed by means of a chemical vapor deposition reaction.
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